Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039406 | Method of gap-filling using amplitude modulation radiofrequency power and apparatus for the same | Jeong-Hoon Han, Young Rok Kim | 2011-10-18 |
| 8017485 | Methods of fabricating a semiconductor device | Du-Hyun Cho, Tae-hyuk Ahn, Sang-Sup Jeong | 2011-09-13 |
| 7866341 | Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same | Hong-Seub Kim, Hyun Soo Park, Soon-Bin Jung, Sung-Ho CHA, Dong Jin Kim +1 more | 2011-01-11 |