Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7866341 | Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same | Hong-Seub Kim, Hyun Soo Park, Sung-Ho CHA, Dong Jin Kim, Wook-Jung Hwang +1 more | 2011-01-11 |