Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972486 | Machine for coating a substrate, and module | Hans Buchberger, Andreas Geiss, Dieter Haas | 2011-07-05 |
| 7959776 | Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates | Andreas Jischke, Uwe SCHÜßLER, Hans Wolf | 2011-06-14 |