Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7959776 | Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates | Jorg Krempel-Hesse, Andreas Jischke, Uwe SCHÜßLER | 2011-06-14 |