Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004290 | Method and apparatus for determining dielectric layer properties | Xiafang Zhang, Nanchang Zhu, Yiping Feng, Min Xiang | 2011-08-23 |
| 7893703 | Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer | Jeffrey Rzepiela, Yiping Feng, Shiyou Pei, Alexander Kagan, Sergio Edelstein | 2011-02-22 |