Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7893703 | Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer | Yiping Feng, Shiyou Pei, Alexander Kagan, Jianou Shi, Sergio Edelstein | 2011-02-22 |