Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064536 | Link calibration | Ganesh Balamurugan | 2011-11-22 |
| 8053159 | Antireflective coatings for via fill and photolithography applications and methods of preparation thereof | Bo Li, Nancy Iwamoto, Victor Lu, Roger Leung, Mark A. Fradkin +2 more | 2011-11-08 |
| 7955782 | Bottom antireflective coatings exhibiting enhanced wet strip rates, bottom antireflective coating compositions for forming bottom antireflective coatings, and methods for fabricating the same | Sudip Mukhopadhyay, Yamini Pandey, Jelena Sepa | 2011-06-07 |
| 7910223 | Planarization films for advanced microelectronic applications and devices and methods of production thereof | Wei Huang, Ronald R. Katsanes | 2011-03-22 |
| 7867331 | Coating composition optimization for via fill and photolithography applications and methods of preparation thereof | Jason Stuck | 2011-01-11 |