Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053159 | Antireflective coatings for via fill and photolithography applications and methods of preparation thereof | Bo Li, Joseph Kennedy, Victor Lu, Roger Leung, Mark A. Fradkin +2 more | 2011-11-08 |