Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7973547 | Method and apparatus for detecting a crack in a semiconductor wafer, and a wafer chuck | Alois Nitsch, Horst Baumeister | 2011-07-05 |
RT
Rainer Tilgner
Overall (2011): #188,249 of 364,097Top 55%
1
Patents 2011