Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049490 | Silicon MEMS resonator devices and methods | Markus Loehndorf, Wolfgang Raberg | 2011-11-01 |
| 8049515 | Silicon MEMS resonators | Markus Loehndorf | 2011-11-01 |
| 8040207 | MEMS resonator devices with a plurality of mass elements formed thereon | Bernhard Winkler, Mohsin Nawaz | 2011-10-18 |
| 7889030 | Passive temperature compensation of silicon MEMS devices | Robert Gruenberger, Mohsin Nawaz, Bernhard Winkler | 2011-02-15 |