Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076738 | Integrally fabricated micromachine and logic elements | Stefan Kolb, Reinhard Mahnkopf, Christian Pacha, Werner Weber | 2011-12-13 |
| 8040207 | MEMS resonator devices with a plurality of mass elements formed thereon | Mohsin Nawaz, Florian Schoen | 2011-10-18 |
| 7889030 | Passive temperature compensation of silicon MEMS devices | Florian Schoen, Robert Gruenberger, Mohsin Nawaz | 2011-02-15 |