Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998882 | Particle reduction in PECVD processes for depositing low-k material by using a plasma assisted post-deposition step | Hartmut Ruelke | 2011-08-16 |
UM
Ulrich Mayer
Overall (2011): #138,237 of 364,097Top 40%
1
Patents 2011