Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998644 | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Osamu Suzuki, Hiroyuki Akagawa, Masaru Tanabe, Atsushi Kawaguchi | 2011-08-16 |