Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7938940 | Support for oxygen separation membrane element and the element using the same | Shigeo Nagaya, Hiroshi Seo | 2011-05-10 |
| 7892708 | Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method | Masaru Tanabe, Atsushi Kawaguchi, Hiroyuki Akagawa | 2011-02-22 |