Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084354 | Method of fabricating a metal cap layer with enhanced etch resistivity for copper-based metal regions in semiconductor devices | Volker Kahlert | 2011-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084354 | Method of fabricating a metal cap layer with enhanced etch resistivity for copper-based metal regions in semiconductor devices | Volker Kahlert | 2011-12-27 |