Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084183 | Resist composition for electron beam, X-ray, or EUV, and pattern-forming method using the same | Katsuhiro Yamashita | 2011-12-27 |
| 8021819 | Sulfonium compound, photosensitive composition containing the compound and pattern-forming method using the photosensitive composition | — | 2011-09-20 |