Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084183 | Resist composition for electron beam, X-ray, or EUV, and pattern-forming method using the same | Yasutomo Kawanishi | 2011-12-27 |
| 8034252 | Metal-polishing liquid and chemical-mechanical polishing method using the same | — | 2011-10-11 |
| 8017299 | Positive resist composition and pattern forming method using the same | — | 2011-09-13 |
| 7902072 | Metal-polishing composition and chemical-mechanical polishing method | — | 2011-03-08 |
| 7866824 | Sealed lamp device and projector | Kei Yamaoka, Motohisa Haga, Kazuya Terasaki, Takashi Nasu | 2011-01-11 |