Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7986455 | Thermally stable multilayer mirror for the EUV spectral range | Nicolas Benoit, Sergiy Yulin, Nobert Kaiser | 2011-07-26 |
| 7920323 | Thermally stable multilayer mirror for the EUV spectral region | Nicolas Benoit, Norbert Kaiser, Sergiy Yulin | 2011-04-05 |