Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021560 | Method for producing a radiation-absorbing optical element and corresponding radiation absorbing optical element | Antje Kaless, Peter Munzert, Michael Scheler, Ulrike Schulz | 2011-09-20 |
| 7920323 | Thermally stable multilayer mirror for the EUV spectral region | Nicolas Benoit, Torsten Feigl, Sergiy Yulin | 2011-04-05 |
| 7914158 | Optical element with an anti-fog layer and method for its production | Ulrike Schulz, Irmina Wendling, Peter Munzert | 2011-03-29 |