Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066495 | Turbo vacuum pump and semiconductor manufacturing apparatus having the same | Hiroaki Ogamino, Hiroyasu Kawashima | 2011-11-29 |
| 7938619 | Turbo vacuum pump | Hiroyuki Kawasaki | 2011-05-10 |