Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066495 | Turbo vacuum pump and semiconductor manufacturing apparatus having the same | Shinichi Sekiguchi, Hiroyasu Kawashima | 2011-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066495 | Turbo vacuum pump and semiconductor manufacturing apparatus having the same | Shinichi Sekiguchi, Hiroyasu Kawashima | 2011-11-29 |