Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084080 | Plasma processing method and plasma processing apparatus | Norikatsu Nakamura, Hiroki Sakata | 2011-12-27 |
| 7867925 | Method for manufacturing pattern formed structure | Hironori Kobayashi | 2011-01-11 |