Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084080 | Plasma processing method and plasma processing apparatus | Yusuke Uno, Norikatsu Nakamura | 2011-12-27 |
| 8062959 | Method of manufacturing semiconductor element | Keiji Sakamoto | 2011-11-22 |