Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057970 | Method and system for forming circular patterns on a surface | Akira Fujimura | 2011-11-15 |
| 8039176 | Method for fracturing and forming a pattern using curvilinear characters with charged particle beam lithography | Akira Fujimura | 2011-10-18 |
| 8017288 | Method for fracturing circular patterns and for manufacturing a semiconductor device | Akira Fujimura | 2011-09-13 |
| 7985514 | Method for fracturing a pattern for writing with a shaped charged particle beam writing system using dragged shots | Akira Fujimura, Harold Robert Zable | 2011-07-26 |