Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062813 | Method for design and manufacture of a reticle using a two-dimensional dosage map and charged particle beam lithography | Akira Fujimura | 2011-11-22 |
| 8017286 | Method for design and manufacture of a reticle using a two-dimensional dosage map and charged particle beam lithography | Akira Fujimura | 2011-09-13 |
| 7985514 | Method for fracturing a pattern for writing with a shaped charged particle beam writing system using dragged shots | Akira Fujimura, Michael Tucker | 2011-07-26 |