Showing 1–9 of 9 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Wenling Wang | Tokyo Electron Limited | 5 |
| 2 | Kenichi Yamaga | Tokyo Electron Limited | 4 |
| 3 | Mitsuru Obara | Konica Minolta | 2 |
| #4 | Hiroto Sato | Hamamatsu Photonics K.K. | 1 |
| #4 | Katsuhiko Anbai | Tokyo Electron Limited | 1 |
| #4 | Manabu Honma | Tokyo Electron Limited | 1 |
| #4 | Kazuhisa Morita | Max Co. | 1 |
| #4 | Yoshihiro Obara | Hitachi | 1 |
| #4 | Yukio Ohizumi | Tokyo Electron Limited | 1 |