Showing 1–8 of 8 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Thomas Hamelin | Tokyo Electron Limited | 4 |
| 2 | Martin L. Culpepper | MIT | 3 |
| 3 | Eric D. Hermanson | Varian Semiconductor Equipment Associates | 2 |
| #4 | Randall H. Moormann | Flow Control | 1 |
| #4 | Timothy T. Smith | Freudenberg-Nok General Partnership | 1 |
| #4 | Joseph Ferrara | Axcelis Technologies | 1 |
| #4 | Steven Lowell | Avid Technology | 1 |
| #4 | Brian P. McKeon | — | 1 |
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