Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7879526 | Hardmask compositions for resist underlayer films | Dong Seon Uh, Chang Il Oh, Do-Hyeon Kim, Hui-Chan Yun, Jin Kuk Lee +1 more | 2011-02-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7879526 | Hardmask compositions for resist underlayer films | Dong Seon Uh, Chang Il Oh, Do-Hyeon Kim, Hui-Chan Yun, Jin Kuk Lee +1 more | 2011-02-01 |