Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049584 | Switching device | Frank Hustert, Ralph Burckhardt, Guido Niewoehner, Hans-Peter Weyand | 2011-11-01 |
| 8027088 | Catadioptric projection objective with tilted deflecting mirrors, projection exposure apparatus, projection exposure method, and mirror | Aksel Goehnermeier, Wolfgang Singer | 2011-09-27 |
| 8010392 | System and method for retroactive, dynamic monitoring of low layout heights in dangerous events | Michael Buser, Ludwig Keller, Grazyna Saganowska, Michael Stengle | 2011-08-30 |
| 7980730 | Metal mesh, arrangement of a metal mesh and method for illumination | Ingo Kufferath-Kassner, Stephan Kufferath-Kassner, Christop Kronhagel | 2011-07-19 |
| 7929115 | Projection objective and projection exposure apparatus for microlithography | — | 2011-04-19 |
| 7903333 | Polarization-modulating optical element and method for manufacturing thereof | Daniel Kraehmer | 2011-03-08 |