Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960646 | Silicon-based thin-film photoelectric converter and method of manufacturing the same | Kenji Yamamoto | 2011-06-14 |
| 7897523 | Substrate heating apparatus, heating method, and semiconductor device manufacturing method | Masami Shibagaki, Hiroshi Doi, Akihiro Egami, Shinya Hasegawa | 2011-03-01 |