Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8032015 | Heating apparatus, heating method, and semiconductor device manufacturing method | Hiroshi Doi | 2011-10-04 |
| 7897523 | Substrate heating apparatus, heating method, and semiconductor device manufacturing method | Hiroshi Doi, Akihiro Egami, Toshiaki Sasaki, Shinya Hasegawa | 2011-03-01 |