Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048277 | Magnet unit and magnetron sputtering apparatus | Einstein Noel Abarra | 2011-11-01 |
| 8043483 | Film forming method by sputtering and sputtering apparatus thereof | Einstein Noel Abarra | 2011-10-25 |
| 7955480 | Sputtering apparatus and film deposition method | Einstein Noel Abarra | 2011-06-07 |