Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053747 | Substrate processing apparatus and cleaning method of the same | Masahiro Shibamoto | 2011-11-08 |
| 8048277 | Magnet unit and magnetron sputtering apparatus | Tetsuya Endo | 2011-11-01 |
| 8043483 | Film forming method by sputtering and sputtering apparatus thereof | Tetsuya Endo | 2011-10-25 |
| 8016537 | Inline-type wafer conveyance device | Naoki Watanabe, David Djulianto Djayaprawira, Yasumi Kurematsu | 2011-09-13 |
| 7955480 | Sputtering apparatus and film deposition method | Tetsuya Endo | 2011-06-07 |