Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8077391 | Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing method | Chidane Ouchi, Masanobu Hasegawa | 2011-12-13 |
| 8004691 | Measuring apparatus, exposure apparatus and method, and device manufacturing method | Chidane Ouchi, Akihiro Nakauchi | 2011-08-23 |
| 7952726 | Measurement apparatus, exposure apparatus having the same, and device manufacturing method | Chidane Ouchi | 2011-05-31 |