Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004691 | Measuring apparatus, exposure apparatus and method, and device manufacturing method | Chidane Ouchi, Seima Kato | 2011-08-23 |
AN
Akihiro Nakauchi
Overall (2011): #360,128 of 364,097Top 100%
1
Patents 2011