Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053311 | Dielectric film and semiconductor device using dielectric film including hafnium, aluminum or silicon, nitrogen, and oxygen | Takashi Nakagawa, Toru Tatsumi | 2011-11-08 |
| 8030694 | Dielectric film and semiconductor device using dielectric film including hafnium, aluminum or silicon, nitrogen, and oxygen | Takashi Nakagawa, Toru Tatsumi | 2011-10-04 |
| 8026143 | Semiconductor element and manufacturing method thereof | Takashi Minami, Motomu Kosuda, Heiji Watanabe | 2011-09-27 |
| 8012822 | Process for forming dielectric films | Yusuke Fukuchi, Nobumasa Suzuki, Hideo Kitagawa | 2011-09-06 |
| 7923360 | Method of forming dielectric films | Hideo Kitagawa | 2011-04-12 |
| 7867847 | Method of manufacturing dielectric film that has hafnium-containing and aluminum-containing oxynitride | Takashi Nakagawa, Toru Tatsumi | 2011-01-11 |