Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085386 | Method for determining exposure condition and computer-readable storage media storing program for determining exposure condition | — | 2011-12-27 |
| 8049191 | Method of transferring pattern of reticle, computer readable storage medium, and method of manufacturing device | Koji Mikami, Hiroyuki Ishii | 2011-11-01 |
| 8029954 | Exposure method and memory medium storing computer program | Koji Mikami, Hiroyuki Ishii | 2011-10-04 |