Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049191 | Method of transferring pattern of reticle, computer readable storage medium, and method of manufacturing device | Kouichirou Tsujita, Hiroyuki Ishii | 2011-11-01 |
| 8029954 | Exposure method and memory medium storing computer program | Kouichirou Tsujita, Hiroyuki Ishii | 2011-10-04 |
| 7864296 | Exposure apparatus, setting method, and exposure method having the same | Kazuhiro Takahashi, Michio Kono | 2011-01-04 |