Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008884 | Substrate processing apparatus with motors integral to chamber walls | Alexander Krupyshev | 2011-08-30 |
| 7988398 | Linear substrate transport apparatus | Robert T. Caveney | 2011-08-02 |
| 7959395 | Substrate processing apparatus | Robert T. Caveney | 2011-06-14 |
| 7904182 | Scalable motion control system | Martin Hosek, Stuart Beale, Roumen Botev, Matthew W. Coady, Mark Ives +2 more | 2011-03-08 |