Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008884 | Substrate processing apparatus with motors integral to chamber walls | Christopher Hofmeister | 2011-08-30 |
| 7880155 | Substrate alignment apparatus comprising a controller to measure alignment during transport | Sergei Syssoev | 2011-02-01 |