Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048328 | Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor | Scott A. Hogenson, Daniel J. Hoffman | 2011-11-01 |
| 7972469 | Plasma processing apparatus | Hiroji Hanawa, Andrew Nguyen, Keiji Horioka, Kallol Bera, Kenneth S. Collins +3 more | 2011-07-05 |
| 7883633 | Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor | Scott A. Hogenson, Daniel J. Hoffman | 2011-02-08 |
| 7879186 | Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor | Jingbao Liu, Bryan Pu, Keiji Horioka | 2011-02-01 |