Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7922440 | Apparatus and method for centering a substrate in a process chamber | Dale R. Du Bois, Mark Fodor, Chiu Chan, Karthik Janakiraman | 2011-04-12 |
| 7867578 | Method for depositing an amorphous carbon film with improved density and step coverage | Deenesh Padhi, Hyoung-Chan Ha, Sudha Rathi, Derek R. Witty, Chiu Chan +6 more | 2011-01-11 |