Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988875 | Differential etch rate control of layers deposited by chemical vapor deposition | Soo Young Choi | 2011-08-02 |
| 7972470 | Asymmetric grounding of rectangular susceptor | Soo Young Choi, Young Jin Choi | 2011-07-05 |
| 7959735 | Susceptor with insulative inserts | William N. Sterling, Lan Anh Duong | 2011-06-14 |
| 7879409 | Repeatability of CVD film deposition during sequential processing of substrates in a deposition chamber | Tae Kyung Won, John M. White | 2011-02-01 |