Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076250 | PECVD oxide-nitride and oxide-silicon stacks for 3D memory application | Nagarajan Rajagopalan, Xinhai Han, Ji Ae Park, Tsutomu Kiyohara, Sohyun Park | 2011-12-13 |
| 7867578 | Method for depositing an amorphous carbon film with improved density and step coverage | Deenesh Padhi, Hyoung-Chan Ha, Sudha Rathi, Derek R. Witty, Chiu Chan +6 more | 2011-01-11 |