Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8007631 | System and method for imprint lithography to facilitate dual damascene integration with two imprint acts | Bhanwar Singh, Ramkumar Subramanian | 2011-08-30 |
| 7915160 | Methods for forming small contacts | Cyrus E. Tabery, Chih-Yuh Yang, Bin Yu | 2011-03-29 |