Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8007631 | System and method for imprint lithography to facilitate dual damascene integration with two imprint acts | Srikanteswara Dakshina-Murthy, Bhanwar Singh | 2011-08-30 |
| 7943289 | Inverse resist coating process | Bharath Rangarajan, Michael K. Templeton | 2011-05-17 |