Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7925369 | Method and apparatus for optimizing models for extracting dose and focus from critical dimension | Kevin R. Lensing, James Broc Stirton | 2011-04-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7925369 | Method and apparatus for optimizing models for extracting dose and focus from critical dimension | Kevin R. Lensing, James Broc Stirton | 2011-04-12 |