Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7925369 | Method and apparatus for optimizing models for extracting dose and focus from critical dimension | Siddharth Chauhan, Kevin R. Lensing | 2011-04-12 |
| 7869894 | Method and system for advanced process control using a combination of weighted relative bias values | Andre Holfeld | 2011-01-11 |