Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084088 | Method of improving the wafer-to-wafer thickness uniformity of silicon nitride layers | Hartmut Ruelke, Michael D. Turner | 2011-12-27 |
KH
Katja Huy
Overall (2011): #251,500 of 364,097Top 70%
1
Patents 2011