Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053315 | Method to manufacture split gate with high density plasma oxide layer as inter-polysilicon insulation layer | Sung-Shan Tai, Yong-Zhong Hu, Francois Hebert, Hong Chang, Mengyu Pan +1 more | 2011-11-08 |
| 8021563 | Etch depth determination for SGT technology | Yingying Lou, Tiesheng Li, Anup Bhalla | 2011-09-20 |
| 7932148 | Processes for manufacturing MOSFET devices with excessive round-hole shielded gate trench (SGT) | Hong Chang, Sung-Shan Tai, Tiesheng Li | 2011-04-26 |
| 7928507 | Polysilicon control etch-back indicator | Tiesheng Li, Sung-Shan Tai, Hong Chang | 2011-04-19 |